Supplementary material for the paper "Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation"

This type of grating is extensively used in light source facilities such as synchrotrons or free electron lasers, with ever-increasing demands in terms of thermal loads, depending on beamline operational parameters and architecture.

The process may be a future alternative to current manufacturing techniques, providing the advantage of being applicable to single-crystal diamond substrates, with their unique properties in terms of heat conductivity and radiation hardness. AFM measured topography of single-crystal diamond sample irradiated with 9 MeV C ions with a dose pattern tuned to obtain a blazed soft X-ray grating.