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Table · dataset · 2026

Supplementary Material

Listed in ZivaHub and Deakin Research Online and DMU Figshare and HKU DataHub and Swinburne Figshare and DaYta Ya Rona and SUNScholarData and figshare and Loughborough Research Repository and GRANTS Data and UP Research Data Repository — shown once because both records carry DOI 10.60893/figshare.apl.33777424.v1

Additional information for manuscript "Influence of Al-precursor and Oxidant on the performance of ALD-Al2O3 ultra-thin films embedded in SiO2 for Modulation Acceptor Doping of Silicon"

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Where it is published

Catalogue records · 1

Topics

From keywords
Astronomy & Astrophysics · Chemistry · Chemistry · Chemistry · Computer Science & AI · Computer Science & AI · Earth & Environmental Science · Earth & Environmental Science · Earth & Environmental Science · Earth & Environmental Science · Earth & Environmental Science · Earth & Environmental Science · Earth & Environmental Science · Earth & Environmental Science · Earth & Environmental Science · Earth & Environmental Science · Earth & Environmental Science · Economics & Finance · Economics & Finance · Engineering · Engineering · Engineering · Engineering · Humanities · Humanities · Humanities · Humanities · Humanities · Life Sciences · Life Sciences · Life Sciences · Life Sciences · Life Sciences · Materials Science · Mathematics & Statistics · Medicine & Health · Medicine & Health · Ocean & Atmospheric Science · Physics · Physics · Physics · Physics · Physics · Physics · Physics · Physics · Physics · Physics · Physics · Psychology & Behavioral Science · Psychology & Behavioral Science · Social Science · Social Science · Social Science · Social Science · Social Science
Inferred from text
Elemental semiconductors 76%
Provenance · 11 source records, 62 field assertions
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ZivaHuboai:figshare.com:article/3377742412 d agoJSON v1
Deakin Research Onlineoai:figshare.com:article/3377742412 d agoJSON v1
DMU Figshareoai:figshare.com:article/3377742412 d agoJSON v1
HKU DataHuboai:figshare.com:article/3377742411 d agoJSON v1
Swinburne Figshareoai:figshare.com:article/3377742411 d agoJSON v1
DaYta Ya Ronaoai:figshare.com:article/3377742411 d agoJSON v1
SUNScholarDataoai:figshare.com:article/3377742411 d agoJSON v1
figshareoai:figshare.com:article/3377742411 d agoJSON v1
Loughborough Research Repositoryoai:figshare.com:article/3377742410 d agoJSON v1
GRANTS Dataoai:figshare.com:article/3377742410 d agoJSON v1
UP Research Data Repositoryoai:figshare.com:article/3377742410 d agoJSON v1
FieldAssertionExtractorEvidence
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