CO2 laser processing of fused silica: mechanisms, defect control and functionalization

The underlying physical principles are systematically examined, including transient thermal fields, structural relaxation and fictive temperature modeling, melt pool dynamics, evaporative ablation, and thermo-mechanical stress generation, alongside the predictive multi-scale models that quantify these interconnected processes. Building on this mechanistic foundation, the technological evolution from local-defect repair to full-aperture, low-defect manufacturing is critically analyzed.

Key strategies for defect risk control are evaluated, and the paradigm shift from subtractive repair to functional manufacturing is delineated. Advances in CO2 laser-based subtractive fabrication and additive manufacturing are reviewed, highlighting the integration of hybrid processes and unconventional synthesis routes. Finally, the outlook identifies priority directions: nanoscale precursor identification, multimodal real-time monitoring, and scalable large-area manufacturing strategies.

By emphasizing mechanism-process linkages and engineering scalability, this review establishes a roadmap for overcoming performance bottlenecks and accelerating the deployment of laser-based advanced manufacturing for high-damage-resistant, functionally integrated fused silica optics.