Temperature calibration, normal force measurements, undisturbed motion measurements, and stick-slip motion cycles in MEMS devices with sliding sidewall surfaces

The corresponding folders include: (a) the peak position measurements from Raman spectroscopy (Raman measurements), (b) the displacement measurements of the 'ram' until it touches a counter-surface for the normal force per contact temperature (normal force data), (c) the displacement measurements of the sliding counter-surface per temperature when it is not in contact with the ram (undisturbed data), (d) the displacement measurements of the counter-surface for increasing temperature when it is in contact with the ram (friction data from 25 to 300), and (e) the displacement measurements of the counter-surface for decreasing temperature when it is in contact with the ram (friction data from 300 to 25).