Data Sets for Simulation of Miniature PDMA for Ultrafine-Particle Measurement

The design parameters include the length, width and height of the grading zone, and the process parameters will lead to the height deviation of the grading zone and the uneven wall of the grading zone. Before studying the parameters, the experimental voltages were compared with the PDMA simulation results to validate the simulation model.

Through the simulation of velocity field and particle trajectory, as well as the experimental data of the original PDMA, the key parameters such as the size of the classification area are optimized. Our study shows that the size of the classification region affects the measurement range of the applied voltage and pdma, and after optimization, the measurement range can be extended to 500nm at low applied voltage. When the reasonable error range of the classification area height is ±2%, PDMA can basically achieve the classification function.