Flexible and rapid fabrication of silver microheaters with spatial-modulated multifoci by femtosecond laser multiphoton reduction

Arbitrarily distributed multifoci are generated with pre-designed holograms loaded on SLM for multiphoton reduction. The experimental parameters for desired AgMWs fabrication with multifoci are systematically investigated and optimized.

On this basis, different AgMW patterns are dynamically and simultaneously fabricated by loading different holograms onto high frequency refreshed SLM in sequence. The quantity and distribution of multifoci can be controlled dynamically by SLM in the fabrication process, even the intensity of individual focus is dynamically modulated by the control of gray level of holograms. Finally, the potential application of this flexible and rapid AgMW fabrication method in microheater fabrication is demonstrated.