Data · collection · 2017
Supplementary material from "Hydrothermally synthesized PZT film grown in highly concentrated KOH solution with large electromechanical coupling coefficient for resonator"
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This paper presents the study of lead zirconate titanate (PZT) films hydrothermally grown on the dome-shaped titanium diaphragm.
Description
Few articles in the literature address the implementation of hydrothermal PZT films on curved-diaphragm substrates for resonators. In this study, a 50-μm-thick titanium sheet is embossed using balls of designed dimensions to shape a dome-shaped cavity array.
Through single-process hydrothermal synthesis, PZT films are grown on both sides of the processed titanium diaphragm with good adhesion and uniformity. The hydrothermal synthesis process involves a high concentration of potassium hydroxide solution and excess amounts of lead acetate and zirconium oxychlorideoctahydrate. Varied deposition times and temperatures of PZT films are investigated.
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The grown films are characterized by X-ray diffraction and scanning electron microscopy. The 10-μm-thick PZT dome-shaped resonators with 60- and 20-μm-thick supporting layers are implemented and further tested. Results for both resonators indicate that large electromechanical coupling coefficients and a series resonance of 95 MHz from 14 MHz can be attained.
The device is connected to a complementary metal oxide–semiconductor integrated circuit for analysis of oscillator applications. The oscillator reaches a Q value of 6300 in air. The resonator exhibits a better sensing stability when loaded with water when compared with air.
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- Repository landing page figshare.com/collections/Supplementary_material_from_Hydrothermally_synthes… ↗
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- DOI doi.org/10.6084/m9.figshare.c.3944680 ↗
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- CC BY 4.0 creativecommons.org/licenses/by/4.0 ↗
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- IsSupplementTo 10.1098/rsos.171363 doi.org/10.1098/rsos.171363 ↗
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Topics
- Stated by source
- Chemical engineering · Chemical sciences · Electrical engineering, electronic engineering, information engineering
- Inferred from text
- Macromolecular and materials chemistry 70% · Microscopy 75%
Related
Provenance · 1 source records, 12 field assertions
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|---|---|---|---|
| DataCite | 10.6084/m9.figshare.c.3944680 | 13 d ago | JSON v1 |
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