Data for the radio frequency sheath of plasma with Cairns–Tsallis electron velocity distribution

To solve this problem, a one-dimensional collisionless RF sheath program with high-energy electrons is developed. Based on the RF sheath model established by Edelberg and Aydil in 1999, the program adds the electronic distribution in the form of Cairns – Tsallis distribution, and is compiled by Compaq Visual Fortran.

The structure of the RF sheath with high-energy electronic components changes with time and space. By changing the two parameters of the distribution function, The dependence of sheath structure on distribution function can be analyzed. On this basis, the ion energy hitting the material, the sheath power dissipation and the energy hitting the material surface can be calculated.