Data · dataset · 2026
Data for: A Stress-Recovered Bottom Dielectric Isolation Scheme for GAA Nanosheet Transistors with Self-Aligned Backside Contact Integration
Listed in ScienceDB
This dataset provides the supporting data for the article “A Stress-Recovered Bottom Dielectric Isolation Scheme for GAA Nanosheet Transistors with Self-Aligned Backside Contact Integration” published in Microelectronics Journal.
Description
The dataset includes raw numerical data and original figures used for device- and circuit-level evaluation of standard GAA, Full-BDI, and SR-BDI nanosheet transistors. The numerical files include transfer characteristics, carrier mobility, RO results, SRAM performance metrics, and related comparison data obtained from TCAD and circuit-level simulations.
These data support the analysis of channel stress recovery, drive-current enhancement, capacitance reduction, and RO/SRAM performance improvements enabled by the proposed SR-BDI architecture.
Links
Where it is published
- DOI doi.org/10.57760/sciencedb.43166 ↗
DOI / persistent id · from scidb cn
Catalogue records · 1
- OAI-PMH record scidb.cn/oai?verb=GetRecord&metadataPrefix=oai_dc&identifier=10.57760%2… ↗
metadata API · from scidb cn
Topics
- From keywords
- Earth & Environmental Science · Engineering · Humanities · Life Sciences · Social Science
- Inferred from text
- Electronics, sensors and digital hardware 69%
Provenance · 1 source records, 11 field assertions
| Source | Key | Last seen | Raw |
|---|---|---|---|
| ScienceDB | 10.57760/sciencedb.43166 | 10 d ago | JSON v1 |
| Field | Assertion | Extractor | Evidence |
|---|---|---|---|
| access_level | source · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].anzsrc:group:4009 | enrichment · scidb cn | taxonomy-embedding@1.0.0 | title+keywords+description (69%) |
| concepts[field].local:field:earth-environmental | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:engineering | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:humanities | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:life-sciences | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:social-science | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| description | source · scidb cn | connector:scidb_cn@1.0.0 | /metadata/dc/description |
| license_text | source · scidb cn | connector:scidb_cn@1.0.0 | |
| publication_date | source · scidb cn | connector:scidb_cn@1.0.0 | |
| title | source · scidb cn | connector:scidb_cn@1.0.0 | /metadata/dc/title |