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Data · dataset · 2024

光场均匀性仿真及实验数据

Listed in ScienceDB

Description

This dataset is the experimental data of the paper "Measurement and Optimization of Writing Light Field Uniformity in Dual galvanometer Laser Scanning Lithography System", which includes measurement data, simulation parameters, simulation results, experimental results, electron microscopy images, and microscopic images 

Links

Where it is published

Catalogue records · 1

Topics

Inferred from text
Geomatic engineering 73% · Image 65% · Microscopy 75% · Simulation 75%
Provenance · 1 source records, 13 field assertions
SourceKeyLast seenRaw
ScienceDB10.57760/sciencedb.1703811 d agoJSON v1
FieldAssertionExtractorEvidence
concepts[field].anzsrc:group:4013enrichment · scidb cntaxonomy-embedding@1.0.0title+keywords+description (73%)
concepts[field].local:field:earth-environmentalmapping · scidb cnconnector:scidb_cn@1.0.0
concepts[field].local:field:engineeringmapping · scidb cnconnector:scidb_cn@1.0.0
concepts[field].local:field:humanitiesmapping · scidb cnconnector:scidb_cn@1.0.0
concepts[field].local:field:life-sciencesmapping · scidb cnconnector:scidb_cn@1.0.0
concepts[field].local:field:social-sciencemapping · scidb cnconnector:scidb_cn@1.0.0
concepts[method].local:method:simulationenrichment · scidb cnkeyword-concept-rules@1.0.0title+description (75%)
concepts[modality].local:modality:imageenrichment · scidb cnkeyword-concept-rules@1.0.0title+description (65%)
concepts[modality].local:modality:microscopyenrichment · scidb cnkeyword-concept-rules@1.0.0title+description (75%)
descriptionsource · scidb cnconnector:scidb_cn@1.0.0/metadata/dc/description
license_textsource · scidb cnconnector:scidb_cn@1.0.0
publication_datesource · scidb cnconnector:scidb_cn@1.0.0
titlesource · scidb cnconnector:scidb_cn@1.0.0/metadata/dc/title