Data for Quantifying photoluminescence variability in monolayer molybdenum disulfide films grown by chemical vapour deposition

Chemical vapour deposition (CVD) is an important method for the preparation of large-area films of monolayer MoS2. The PL character of as-prepared monolayer MoS2 must be well understood to facilitate detailed evaluation of any process-induced effects during device fabrication.

We comparatively explore the PL emission from four different commercially available CVD-grown MoS2 monolayer films. We characterize the samples via Raman and PL spectroscopy, using both single-spot and mapping techniques, while atomic force microscopy (AFM) is applied to map the surface structure. Via multipeak fitting, we decompose the PL spectra into constituent exciton and trion contributions, enabling an assessment of the quality of the MoS2 monolayers.