Research data for "Investigation of sputtering and erosion phenomena in radio-frequency quadrupoles"

Beams 28, 104501 (2025). Technical details The raw measurement files presented here are all human-readable ASCII files. For the sputter yield measurements, the files contain the term "QCM_data".

These files contain the recorded quartz crystal microbalance (QCM) frequencies together with a time-stamp, in a 2-column format. Although within one such file there are recorded data for multiple incidence angles (for practical reasons, i.e. one file is one un-interrupted angle scan measurement), the file name itself indicates the order of the different angles. The 4 datasets represent 4 measurements using different beam energies and species, also indicated in the file name.

An example is shown in Figure 5 of the published paper, with visual explanation of the data interpretation. For calculating absolute sputter yields from QCM measurements, one needs the intensity of the incident beam, and the constants of the quartz crystal microbalance. Incident beam intensity is calculated from the beam profiles, found in the files starting with a name "BeamProfile" for each beam energy and species.

For the 2 keV H+, 2 keV Ar+ and 36 keV Ar6+ irradiation, the average beam intensity was calculated from the profiles taken before and after. For the 6 keV H+, there are 5 more beam profiles recorded in addition to the before and after ones. These intermediate beam profiles were recorded evenly distributed during the whole measurement.

The QCM constants used for the experiment can be found in the file "QCM_constants.txt". The files starting with "25Cu1" (which is the sample ID that is used for the study), are AFM data. For each AFM measurement, both the raw microscopy data file converted to a human-readable ASCII file, and a visual representation in png format are available.

The ones containing the term "before" were taken before the sputter yield measurement, while those with the term "after" were taken after the ion irradiations.