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Table · dataset · 2026

Highly Oriented β‑In<sub>2</sub>S<sub>3</sub> Thin Films Grown via Two-Flow-Channel Vertical Chemical Vapor Deposition for Photoconductive Devices

Listed in ZivaHub and Deakin Research Online and DMU Figshare — shown once because both records carry DOI 10.1021/acs.inorgchem.6c03168.s001

β-In<sub>2</sub>S<sub>3</sub> thin films with a defective spinel structure have attracted much attention due to their intriguing optoelectronic properties, yet it remains challenging to synthesize them with high quality and crystallographic orientation.

Description

This article reports the highly oriented growth of β-In<sub>2</sub>S<sub>3</sub> thin films according to the symmetry of the sapphire substrate via two-flow-channel vertical chemical vapor deposition (CVD) with an automatic gas supply system.

This sophisticated CVD system enables us to control all critical parameters, including reaction temperature, precursor temperatures, and supply amounts of individual precursors, as well as to suppress complex convection, which is vital for the controllable synthesis of β-In<sub>2</sub>S<sub>3</sub> thin films. The crystal quality and oriented growth of the films were confirmed by X-ray diffraction and Raman spectroscopy.

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In addition, a rigorous method for distinguishing polymorphs of highly oriented In<sub>2</sub>S<sub>3</sub> thin films is discussed to avoid the confusion seen in the literature. The as-fabricated In<sub>2</sub>S<sub>3</sub> photoconductive device shows a high responsivity of 196 A·W<sup>–1</sup> and a detectivity of 4.81 × 10<sup>11</sup> Jones under white-light irradiation. Our work provides a new CVD method to produce high-quality oriented β-In<sub>2</sub>S<sub>3</sub> thin films for optoelectronic applications.

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Catalogue records · 1

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Provenance · 3 source records, 35 field assertions
SourceKeyLast seenRaw
ZivaHuboai:figshare.com:article/3404604710 d agoJSON v1
Deakin Research Onlineoai:figshare.com:article/3404604710 d agoJSON v1
DMU Figshareoai:figshare.com:article/3404604710 d agoJSON v1
FieldAssertionExtractorEvidence
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