Frequency-domain Characteristic and Error Convergence Dataset for Wafer and Reticle Stage Synchronization Performance Research

To fill the gap of publicly available standard curve datasets for synchronization performance verification of wafer and reticle stages in precision lithography systems, this study releases a dedicated frequency-domain and error convergence dataset oriented to synchronization-performance-oriented frequency-domain iterative learning control. The dataset exclusively consists of original MATLAB data files (.mat) and visualized result images, which fully correspond to the core experimental and simulation conclusions of the associated research on wafer and reticle stage control.This dataset systematically records two core types of curve data: the frequency-domain characteristic curves of MA and MSD for stage synchronization systems, and the iterative error convergence curves under frequency-domain iterative learning control strategies.

All data are generated based on the precision motion model of wafer and reticle stages under actual working conditions, reflecting the authentic frequency response characteristics and iterative learning synchronization optimization effects of the precision motion system. The stored .mat files retain complete original sampling data of system frequency domain characteristics and error changes, while the attached images present intuitive visualized curves of synchronization performance and error convergence trends.As a standardized supplementary data resource for precision stage motion control research, this dataset can support result reproduction, comparative analysis of frequency-domain control strategies, and synchronization performance evaluation of wafer and reticle stages, providing reliable data support for iterative learning control research in ultra-precision lithography motion systems.