The code for ion energy distribution in a radio frequency sheath of plasma with Kappa electron velocity distribution

When there are high energy electrons in the RF sheath, the change of sheath potential will cause the dependence of ion energy distribution on the high energy electrons. To solve this problem, a one-dimensional collisionless RF sheath program with high-energy electronic components is developed.

Based on the RF sheath model established by Edelberg and Aydil in 1999, the program assumes that the high-energy electronic components obey the Kappa velocity distribution, and makes changes in the program we wrote earlier [An, Ou, and Men, Plasma Sci. Technol. 22 (2020) 065103]. The program can be used to analyze the sheath structure of non - Maxwell electrons and the influence of disturbing current and frequency on sheath structure in the case of non Maxwell electrons.