Original data of the Raman and EDXS analyses of Baideng microbial fossils in Cui et al., 2023

This system can provide a horizontal resolution of ~1μm and a vertical resolution of ~2μm with use of a ×100 objective. Raman spectra were excited by a 532 nm green laser with 1%–10% ND filter (ca. 0.3–3mW output power) over a ~1μm spot.

Single spectrum was baseline-corrected and images of quartz, apatite and Kerogen were acquired in a 20 cm−1 broad spectral window centered at 464 cm−1, 20 cm−1 broad centered at 964 cm−1, 380 cm−1 broad centered at 1470 cm−1, respectively. Energy dispersive X-ray spectroscopy (EDXS) analyses were undertaken by an Oxford instrument X-Max 80 mm2 Silicon Drift Detector equipped on the ThermoFisher Helios G4 UC Focused Ion/Electron Dual Beam system.