Simulation Data for Sensitivity Enhancement of a Mechanical Capacitive Accelerometer through Cantilever-Beam Geometry Design and Electrostatic Tuning

It contains COMSOL Multiphysics model files (.mph) and numerical data tables (.csv) for the structural parameter analysis and electrostatic tuning of a mechanical capacitive accelerometer.The data describe the effects of cantilever-beam length and thickness on displacement sensitivity and natural frequency, the first six natural frequencies of the full structural model, and the displacement and differential capacitance responses under different tuning voltages.

The dataset also includes theoretical and simulation results for the first natural frequency as a function of tuning voltage.The MPH files can be opened using COMSOL Multiphysics with the required modules. The CSV files can be accessed using common spreadsheet software or programming tools. These data are derived from theoretical calculations and numerical simulations, rather than experimental measurements.