A Dataset on the Effects of Multiple Contaminant Components on Spectral Performance of Reflective Mirrors in Resonance Ionization Spectroscopy

Based on the optical constants of thin film materials such as Ta2O5/SiO2/Ag/Al2O3, dielectric films and metal - dielectric films were designed. Moreover, the influences of different types and thicknesses of contaminants such as Nd/NdOx/C/Fe on the spectral performance of the thin film reflectivity were calculated according to the optical constants of these contaminants.

The dataset includes the optical constants of various materials, the design structures of the thin films, and the calculation results of the reflectivity.