Data for: Development of a novel nickel-based metal force microsensor using bottom-up approach

Measurement data behind the results of the article "Development of a novel nickel-based metal force microsensor using bottom-up approach" (W.J. Dera, H. Konopacka, D.M. Jarząbek, Precision Engineering 95 (2025) 251-261, doi.org/10.1016/j.precisioneng.2025.05.003). The sensor is a capacitive comb force microsensor made of nanocrystalline nickel by electrodeposition into a photoresist mould (bottom-up process). The dataset contains: - force-capacitance calibration (Fig. 7, Eq. 7): raw force of the reference transducer, raw AD7746 capacitance codes and every processing step (pairing, taring, time alignment, resampling, 5-sample moving average, trimming, linear fit); - force-displacement points used to determine the spring constant (Fig. 8a, Eq. 8); - capacitance drift under a constant load of about 2 N (Fig. 8b), raw codes and values in pF; - stability records of the reference force transducer at 1 N and 2 N (Fig. 9); - the screen capture of the capacitance anomaly between 3 and 5 N (Fig. 11) and microscope photographs of the out-of-plane rib deflection (Fig. 12); - the image files of all twelve figures of the article.

README.txt describes every file, the columns and units, the instruments and the processing steps.