Research data for the manuscript "On the integration of dielectrometry into electrochemical impedance spectroscopy to obtain characteristic properties of a dielectric thin film"

### Supplementary Research Data for the manuscript ### "On the combination of capacitive sensing and electrochemical impedance spectroscopy to obtain characteristic properties of a dielectric thin film" ### by Benedikt Sapotta, Matthias Schwotzer, Christof Wöll and Matthias Franzreb ### Content # 1 Impedance_Raw_Data - calibration data for the IDE geometry, only the frequency range 1-2 MHz was used, as mentioned in the main text - impedance sweeps recorded at the end of linker cycles - impedance sweeps recorded at the end of metal cycles - fit results to the equivalent circuit model - animated bode plot of the growth process # 2 Monte_Carlo_Error_Propagation - script and readily compiled input data for the error propagation in accordance to the data flow chart in Fig S4 the script is based on the python programming language and needs to be saved as a .py file # 3 Micrographs - Micrographs used in the manuscript and supporting information # 4 3D_Print_Files_for_Flow_Cell - .stl files of the individual components.

The Pogo-Pins were embedded into the mounting using the same Plasgray polymer resin. - two UNF 1/4" 28G threads were cut into the FlowCell at the designated holes after printing for liquid connection - the individual components were fastend with M3 screws # 5 XRD - XRD data of the uncoated and coated IDE geometry