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Data · dataset · 2017

Hybrid top-down/bottom-up fabrication of regular arrays of AlN nanorods for deep-UV core-shell LEDs: Dataset

Listed in University of Bath Research Data Archive

This dataset contains scanning electron microscopy (SEM) images and Catodoluminescence (CL) measurements carried out on AlN nanorod.

Description

The samples were fabricated via a hybrid top-down/bottom up approach. Displacement Talbot Lithography is used to fabricate Au/Ni metal dots to act as a hard etch mask.

AlN nanorod arrays are created by inductively coupled plasma dry etching of an AlN template. AlN facet recovery is performed by Metal Organic Vapor Phase Epitaxy regrowth. CL was used to assess the optical quality of the AlN nanorod.

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Where it is published

Catalogue records · 1

Topics

From keywords
Earth & Environmental Science
Inferred from text
Image 65% · Microscopy 75%
Provenance · 1 source records, 7 field assertions
SourceKeyLast seenRaw
University of Bath Research Data Archiveoai:researchdata.bath.ac.uk:4152 d agoJSON v1
FieldAssertionExtractorEvidence
concepts[field].local:field:earth-environmentalmapping · researchdata bath ac ukconnector:researchdata_bath_ac_uk@1.0.0
concepts[modality].local:modality:imageenrichment · researchdata bath ac ukkeyword-concept-rules@1.0.0title+description (65%)
concepts[modality].local:modality:microscopyenrichment · researchdata bath ac ukkeyword-concept-rules@1.0.0title+description (75%)
descriptionsource · researchdata bath ac ukconnector:researchdata_bath_ac_uk@1.0.0/metadata/dc/description
license_textsource · researchdata bath ac ukconnector:researchdata_bath_ac_uk@1.0.0
publication_datesource · researchdata bath ac ukconnector:researchdata_bath_ac_uk@1.0.0
titlesource · researchdata bath ac ukconnector:researchdata_bath_ac_uk@1.0.0/metadata/dc/title