The data of the article “Room temperature exciton polaritons in monolayer WS2 with suspended SiNx photonic crystal”

File 1, corresponding to Figure 1 in the text, primarily contains a schematic of the SiNₓ grating structure and the transverse electric (TE) mode electric field distribution ("光栅结构示意图.png"), the simulated photonic dispersion ("SiNx光栅光学色散仿真.csv", Origin) and quality factor ("SiNx光栅品质因子仿真.csv", Origin) of the SiNₓ grating PC, the measured photonic dispersion of the SiNₓ grating PC ("SiNx光栅光学色散测量.csv", Origin), an optical micrograph of the monolayer WS₂ transferred onto the SiNₓ grating surface captured under a 100× objective lens ("单层WS2-SiNx PC复合器件光学照片.png"), and a schematic diagram of the monolayer WS2-SiNₓ PC composite device ("单层WS2/SiNx PC复合器件示意图.png").

File 2, corresponding to Figure 2, primarily includes the momentum-resolved PL spectra of the monolayer WS₂-PC composite device ("复合器件动量分辨PL谱.csv", Origin), along with the experimental data and corresponding fitting results for the upper and lower dispersion branches of the exciton-polaritons ("激子极化激元上下两支实验和拟合结果.csv", Origin). Finally, File 3, corresponding to Figure 3, mainly contains the spectral data extracted from the momentum-resolved photoluminescence spectra, specifically the normalized PL spectrum of the bare PC ("纯PC归一化PL谱.csv", Origin), the normalized PL spectrum of the monolayer WS2 ("单层WS2归一化PL谱.csv", Origin), and the normalized PL spectrum of the monolayer WS₂-PC composite device ("单层WS2-PC复合器件归一化PL谱.csv", Origin).