《Investigation of TIS Effect in the E-beam Overlay Measurement》Related Data

This dataset is accompanied by three images, from the influence of TIS (Tool Induced Shift) on the measurement results of Overlay, to the influence of different electron beam imaging methods on Overlay, and extended to three aspects of image grayscale symmetry under different imaging methods, forming a complete data system as a whole. Figure 1 shows the analysis of the impact of TIS in vertical and horizontal scanning modes, Figure 2 shows the schematic diagrams of Normal Scan, Special Scan, and the impact analysis of TIS in Special Scan mode, and Figure 3 shows the grayscale distribution under four imaging conditions.