EUV source monitoring

The data were acquired under reference blank conditions, where no test sample was introduced into the optical path, and were used to characterize the intrinsic shot-to-shot fluctuation behavior of the EUV source and the corresponding responses of multiple monitoring channels.The dataset provides synchronized multi-channel signal records associated with individual EUV pulses.

These blank-condition measurements serve as the training basis for establishing a predictive reconstruction model of the reference source intensity. By learning the correlation between the auxiliary monitoring signals and the target reference signal under blank conditions, the trained model can estimate the virtual reference intensity during subsequent transmission measurements. This enables single-shot or segment-wise correction of source intensity fluctuations and improves the accuracy and robustness of transmission coefficient evaluation.The dataset is intended to support research on EUV source monitoring, data-driven signal reconstruction, transmission coefficient measurement, uncertainty evaluation, and fluctuation compensation in pulsed light-source experiments.