Flexible vibrational energy harvesting devices using strain-engineered perovskite piezoelectric thin films [* Cross-Reference *]

Using the strain-engineered PZT thin film, a small-scale and flexible vibrational energy harvester is fabricated using a simple punching process without any complex microelectromechanical system (MEMS) or etching processes. The maximum power and the corresponding peak voltage of the device are 5.6 µW and 690 mV, respectively, which are much higher values than those of MEMS-based vibrational energy harvester. The improved device performance of our flexible small-scale vibrational energy harvester is due to the enhanced PZT film properties by the stress engineering, the increased flexure and deflection of the flexible structure, and the easy vibrational sensitivity at low acceleration of 0.5g, compared to the MEMS-based device integrated with conventional Si-based substrates.

The results prove that our strain-tuned PZT thin film-based flexible vibrational piezoelectric energy harvester is a promising candidate for autonomous power systems and future small-scale mobile platforms. ***This entry has been automatically imported via Infodoc(ASO) CSV by LIST harvest scripts. Please refer to doi.org/10.1016/j.nanoen.2018.10.068 for the original and latest version of the dataset and data downloads***