Data · dataset · 2024
Plasma-enhanced atomic-layer-deposited HfO2–SiO2 nanolaminates for broadband antireflection coatings
Listed in ScienceDB
The ellipsometry parameters of the monolayer coatings were measured using a spectroscopic ellipsometer (SE; Horiba Uvisel 2) at an angle of incidence of 70° in the reflection mode.
Description
The measurement range was 500–900 nm and the step size was 10 nm. The thickness and n were fitted using the commercial software DeltaPsi2.
During the fitting, a three-phase physical model of Si|Coating|Air was established, Sellmeier dispersion oscillators [30] were adopted, and the extinction coefficient was regarded as zero. For comparison, the monolayer thickness was characterized using grazing-incidence X-ray reflectometry (XRR; PANalytical Empyrean). The cross-sectional morphologies of the coatings were characterized using high-resolution transmission electron microscopy (TEM; Thermo Fisher Talos F200X S), and the chemical composition profiles were mapped using energy dispersive spectrometry (EDS; Thermo Fisher Super-X).
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The reflectance and transmittance spectra in the range of 500–900 nm were measured using a UV–visible (VIS)–near infrared (NIR) spectrometer (Lambda 1050 UV/VIS/NIR; Perkin-Elmer).
Links
Where it is published
- DOI doi.org/10.57760/sciencedb.16443 ↗
DOI / persistent id · from scidb cn
Catalogue records · 1
- OAI-PMH record scidb.cn/oai?verb=GetRecord&metadataPrefix=oai_dc&identifier=10.57760%2… ↗
metadata API · from scidb cn
Topics
- From keywords
- Earth & Environmental Science · Engineering · Humanities · Life Sciences · Physics · Social Science
- Inferred from text
- Microscopy 75%
Provenance · 1 source records, 12 field assertions
| Source | Key | Last seen | Raw |
|---|---|---|---|
| ScienceDB | 10.57760/sciencedb.16443 | 11 d ago | JSON v1 |
| Field | Assertion | Extractor | Evidence |
|---|---|---|---|
| access_level | source · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:earth-environmental | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:engineering | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:humanities | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:life-sciences | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:physics | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[field].local:field:social-science | mapping · scidb cn | connector:scidb_cn@1.0.0 | |
| concepts[modality].local:modality:microscopy | enrichment · scidb cn | keyword-concept-rules@1.0.0 | title+description (75%) |
| description | source · scidb cn | connector:scidb_cn@1.0.0 | /metadata/dc/description |
| license_text | source · scidb cn | connector:scidb_cn@1.0.0 | |
| publication_date | source · scidb cn | connector:scidb_cn@1.0.0 | |
| title | source · scidb cn | connector:scidb_cn@1.0.0 | /metadata/dc/title |